Control method of touch display apparatus

ABSTRACT

A control method of a touch display apparatus applicable to a probe station is provided. The probe station includes a movable element. The movable element is a chuck stage, a camera stage, a probe platen, or a positioner. The control method of a touch display apparatus includes displaying a first window and a second window on a touch display apparatus; displaying an operation interface on the first window and displaying a real-time image on the second window; and detecting a touch instruction generated on the operation interface, where the movable element moves according to the touch instruction.

CROSS-REFERENCE TO RELATED APPLICATION

This non-provisional application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 62/676,308, filed onMay 25, 2018, the entire contents of which are hereby incorporated byreference.

BACKGROUND Technical Field

The present invention relates to a control method of a touch displayapparatus, and in particular, to a movable element control method of atouch display apparatus of a probe station.

Related Art

A common probe station controls a movable element, such as a chuckstage, a camera stage, or a positioner stage, in a machine station byusing a physical button or joystick disposed on the machine station, andthe movable element is displaced based on control of the physical buttonor joystick on the machine station. When operating the physical buttonor joystick, a user can determine a control result only based onoperation experience and hand feeling. This cannot meet diversifiedcontrol demands.

SUMMARY

The present invention provides a control method of a touch displayapparatus, applicable to a probe station including a movable element,where the movable element is selected from one of a chuck stage, acamera stage, and a positioner. The control method of a touch displayapparatus includes: displaying a first window and a second window on atouch display apparatus; displaying an operation interface on the firstwindow, and displaying a real-time image on the second window; anddetecting a touch instruction generated on the operation interface,where the movable element moves according to the touch instruction.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will become more fully understood from thedetailed description given herein below for illustration only, and thusare not limitative of the present invention, and wherein:

FIG. 1 shows a probe station to which an embodiment of a control methodof a touch display apparatus is applicable according to the presentinvention;

FIG. 2 is a schematic diagram of an embodiment that a touch displayapparatus of a probe station to which a control method of a touchdisplay apparatus is applicable displays an operation interfaceaccording to the present invention;

FIG. 3 is a schematic diagram of another embodiment of an operationinterface to which a control method of a touch display apparatus isapplicable according to the present invention;

FIG. 4 is a schematic diagram of still another embodiment of anoperation interface to which a control method of a touch displayapparatus is applicable according to the present invention;

FIG. 5 is a schematic diagram of yet another embodiment of an operationinterface to which a control method of a touch display apparatus isapplicable according to the present invention; and

FIG. 6 is a schematic diagram of still yet another embodiment of anoperation interface to which a control method of a touch displayapparatus is applicable according to the present invention.

DETAILED DESCRIPTION

Referring to FIG. 1, FIG. 1 shows a probe station to which an embodimentof a control method of a touch display apparatus is applicable accordingto the present invention. The probe station 1 shown in FIG. 1 includes achuck stage 11, a camera stage 12, a probe platen 13, a touch displayapparatus 14, a positioner 15, and a casing 16. The chuck stage 11, thecamera stage 12, and the positioner 15 are movable elements. The touchdisplay apparatus 14 may be configured to display a digital wafer map, awafer calibration substrate image, and an image captured by the camerastage 12 in real time. The positioner 15 is disposed on the probe platen13. The positioner 15 can move relative to the probe platen 13. Thecamera stage 12 may capture an image above the chuck stage 11 along a Zaxis direction, or may capture an image along a side of the casing 16along an X axis direction or a Y axis direction. In addition, themovable elements are not limited to the chuck stage 11, the camera stage12, and the positioner 15.

Still referring to FIG. 1, a wafer 20 is mounted on the chuck stage 11of the probe station 1, and a probe 30 is fixed on the positioner 15.Herein, the probe 30 may be disposed on the positioner 15 and then bedisposed on the probe platen 13 or may be disposed on a probe card andthen be disposed on the probe platen 13. The present invention is notlimited thereto. The probe platen 13 of the probe station 1 may bedisplaced to approach the chuck stage 11, the probe 30 on the probeplaten 13 is in contact with the wafer 20, and a tip of the probe 30 isin contact with the wafer 20 and pierces an oxide layer to form anelectrical connection to perform detection.

Referring to FIG. 1 and FIG. 2, herein, the touch display apparatus 14of the probe station 1 may be configured to display an operationinterface W11 for controlling the movable element, and a user controlsthe movable element by using the touch display apparatus 14. Further, inan embodiment, information about control is displayed by using the touchdisplay apparatus 14 so that a detection operator can more quickly andaccurately determine a control status of the movable element. One stepof the control method of a touch display apparatus in the presentinvention is displaying a first window W1 and a second window W2 on thetouch display apparatus 14. In an embodiment, the first window W1 andthe second window W2 are simultaneously displayed on the touch displayapparatus 14. Therefore, the first window W1 and the second window W2may be displayed on the touch display apparatus 14 in parallel or bedisplayed on the touch display apparatus 14 in an overlapping manner.

Further, another step of the control method of a touch display apparatusin the present invention is displaying the operation interface W11 onthe first window W1 and displaying a real-time image W21 on the secondwindow W2. The operation interface W11 on the first window W1 is agraphical interface configured to control displacement of the movableelement, and the real-time image W21 on the second window W2 is an imagethat is captured by the camera stage 12 in real time and that is of thewafer 20 on the chuck stage 11.

Further, still another step of the control method of a touch displayapparatus in the present invention is after displaying the operationinterface W11 on the first window W1, detecting a touch instructiongenerated on the operation interface W11, where the movable elementmoves according to the touch instruction.

In an embodiment, a manner in which the movable element moves accordingto the touch instruction generated on the operation interface W11 on thefirst window W1 may include linear displacement, rotation, or acombination of linear displacement and rotation. Specifically, in anembodiment that the movable element performs linear displacementaccording to the touch instruction, the movable element may move along asingle linear direction, move along two linear directions that areperpendicular to one another, or move along three linear directions thatare perpendicular to each other.

Further, the touch instruction generated on the operation interface W11may be performing an action of tap, rotation, sliding, or multi-touch ata position that is on the first window W1 of the touch display apparatus14 and that corresponds to the operation interface W11. To be specific,when the operator performs an action of tap, sliding, or multi-touch ata position that is on the first window W1 of the touch display apparatus14 and that corresponds to the operation interface W11, the operationinterface W11 may detect the touch instruction. Certainly, in otherembodiments, a touch action capable of generating a touch instructionmay also be user-defined.

In some embodiments, the touch instruction that is generated on thefirst window W1 of the touch display apparatus 14 and corresponding tothe operation interface W11 may be different according to differentimages on the operation interface W11. In an embodiment, referring toFIG. 2, the operation interface W11 includes an image of a visual scrollwheel A.

In this embodiment, a manner of generating a touch instruction on theimage of the visual scroll wheel A may be an operation mode thatsimulates that of a physical scroll wheel. To be specific, the user mayperform scrolling or sliding on the image of the visual scroll wheel Aof the touch display apparatus 14 to achieve a same control effect thatcan be achieved by a physical scroll wheel. Specifically, the image ofthe visual scroll wheel A has a rectangular outline, and a touchinstruction may be generated through sliding along a long side of theimage of the visual scroll wheel A. The touch instruction generated onthe image of each visual scroll wheel A may be used to control themovable element to be displaced along a single linear direction.Therefore, in other embodiments, referring to FIG. 2 and FIG. 3, whenthe movable element is to be controlled to be displaced along aplurality of linear directions, images of a plurality of visual scrollwheels A may be provided on the first window W1, and the touchinstructions generated on the images of the visual scroll wheels A maybe used to control the movable element to be displaced toward differentlinear directions.

Still referring to FIG. 2 and FIG. 3, further, in an embodiment in whichthe images of the plurality of visual scroll wheels A are provided onthe first window W1, to make a detection operator intuitively learn ofcontrol directions of movable elements corresponding to the images ofthe visual scroll wheels A, in an embodiment, the control directions ofthe movable elements corresponding to the images of the visual scrollwheels A may be indicated directly by using, but is not limited to,letters. In this embodiment, the first window W1 may include a literalindication at a position adjacent to the image of the visual scrollwheel A, and the literal indication directly corresponds to a controldirection of a movable element of an image of an adjacent visual scrollwheel A. In a specific embodiment, the literal indication may be, but isnot limited to, an English letter such as X, Y, or Z to directlyindicate the control direction of the movable element corresponding tothe image of the visual scroll wheel A.

Still referring to FIG. 2 and FIG. 3, in another embodiment, the longside of the image of the visual scroll wheel A may be provided along thecontrol direction of the corresponding movable element, so that the usercan intuitively learn of the control directions of the movable elementscorresponding to the images of the visual scroll wheels A through visualsense. Certainly, arranging the images of the visual scroll wheels A inparallel and distinguishing the control directions of the movableelements corresponding to the images of the visual scroll wheels A byusing the literal indication is also a feasible implementation mode.

Still referring to FIG. 2 and FIG. 3, in an embodiment, to more clearlyindicate a method for touching the image of the visual scroll wheel A tothe detection operator, the first window W1 may further include a firsttouch indication and a second touch indication at two ends of the longside of the image of the visual scroll wheel A. The first touchindication and the second touch indication may be indicating, by usingimages, moving to two ends of a direction controlling displacement ofthe movable element. Specifically, the first touch indication and thesecond touch indication are images of arrows having opposite directions.Therefore, the detection operator performs sliding or scrolling on theimage of the visual scroll wheel A according to an indication directionof the first touch indication or the second touch indication to generatethe touch instruction on the image of the visual scroll wheel A.

Referring to FIG. 4, in an embodiment, the operation interface W11 mayinclude an image of a visual joystick B. In this embodiment, a manner ofgenerating a touch instruction on the image of the visual joystick B maybe an operation mode that simulates that of a physical joystick. To bespecific, the user may perform dragging as well as keeping in contactwith the image of the visual joystick B of the touch display apparatus14 to achieve a same control effect that can be achieved by a physicaljoystick. Specifically, the image of the visual joystick B includes atleast a touch joystick region B1, an instruction generation region B2,and an instruction boundary B3. The touch joystick region B1 iscircular. The instruction boundary B3 and the outline of the touchjoystick region B1 form a concentric circle, and the diameter of theinstruction boundary B3 is larger than the diameter of the outline ofthe touch joystick region B1, and the range between the outline of thetouch joystick region B1 and the instruction boundary B3 is theinstruction generation region B2.

In this embodiment, the touch instruction may be generated when contactwith the touch joystick region B1 in the image of the visual joystick Bis kept and when the touch joystick region B1 is dragged to theinstruction generation region B2. The user can touch and press the touchjoystick region B1 and drags the touch joystick region B1 to rotate, tobe displaced toward the instruction boundary B3, to generate the touchinstruction in the instruction generation region B2. Specifically, thetouch joystick region B1 is dragged to any position in the instructiongeneration region B2, and different coordinate values may be definedaccording to two-dimensional coordinates. Different touch instructionsare generated on the operation interface W11 according to differentcoordinate values. In a specific implementation mode, when the touchinstruction is generated according to a two-dimensional coordinatevalue, the image of the visual joystick B may be, but is not limited to,used to control the movable element to be displaced along an X directionand a Y direction that are perpendicular to one another.

Referring to FIG. 5, in an embodiment, the instruction generation regionB2 in the image of the visual joystick B further includes a plurality offirst segment control regions B21. The first segment control regions B21are specifically ring-shaped regions whose distances from the circlecenter of the touch joystick region B1 are different. Specifically, thefirst segment control regions B21 are concentric rings having differentdiameters relative to the touch joystick region B1. The first segmentcontrol region B21 further includes a plurality of second segmentcontrol regions B22, and the second segment control regions B22 arespecifically sector regions obtained by dividing the first segmentcontrol region B21 with equal circumference angles. Herein, differenttouch instructions may be generated in the first segment control regionB21 and the second segment control region B22. In a specificimplementation mode, the touch instructions generated in different firstsegment control regions B21 may be used to control the movable elementto move at different moving speeds, and the touch instructions generatedin different second segment control regions B22 may be used to controlthe movable element to be displaced toward different displacementdirections.

Still referring to FIG. 5, further, in a specific embodiment, the firstsegment control region B21 may further be set according to a distancefrom the touch joystick region B1 to control the moving speed of themovable element. For example but not limited to, the first segmentcontrol region B21 closer to the touch joystick region B1 controls themoving speed of the movable element to be slower, and the moving speedof the movable element increases as the distance from the touch joystickregion B1 increases. Certainly, the user may make definition on its ownthe first segment control regions B21 to control the moving speed of themovable element.

It may be learned from the embodiment in FIG. 5 that the instructiongeneration region B2 in the image of the visual joystick B includes fourfirst segment control regions B21, and the first segment control regionsB21 may include different quantities of second segment control regionsB22. In this embodiment, the first segment control regions B21 mayinclude different quantities of second segment control regions B22according to different areas. Specifically, the first segment controlregion B21 closest to the touch joystick region B1 includes four secondsegment control regions B22, and the remaining first segment controlregions B21 may include eight second segment control regions B22 becauseareas thereof gradually increase. It should be noted that quantities ofthe first segment control regions B21 and the second segment controlregions B22 are only used as examples for description. The presentinvention is not limited thereto. By setting different quantities of thefirst segment control regions B21 or the second segment control regionsB22, the accuracy of the touch instruction is improved.

According to the above, when the user touches and presses the touchjoystick region B1 in the image of the visual joystick B and drags thetouch joystick region B1 to be displaced toward different first segmentcontrol regions B21 and different second segment control regions B22,the user can correspondingly control the movable element to be displacedtoward different directions at different moving speeds. When touchingand pressing and controlling the image of the visual joystick B, theuser may quickly determine, from images of the first segment controlregion B21 and the second segment control region B22 displayed on theoperation interface W11 and through visual sense, a control speed ordirection corresponding to a current operation, to more quickly andaccurately perform control.

Referring to FIG. 5, in an embodiment in which the operation interfaceW11 includes the image of the visual joystick B, because the entireimage of the visual joystick B is a two-dimensional circular planarimage, the image of the visual joystick B is mainly used to control themovable element to move in two-dimensional directions that areperpendicular to one another. When the movable element needs to move inthree-dimensional directions, the operation interface W11 may includeboth the image of the visual scroll wheel A and the image of the visualjoystick B. A touch instruction corresponding to movement intwo-dimensional directions is generated by using the image of the visualjoystick B, and a touch instruction of moving in a third directionperpendicular to the two-dimensional directions is generated by usingthe image of the visual scroll wheel A, to satisfy a movement controlneed in three-dimensional directions.

In an embodiment, referring to FIG. 6, the operation interface W11 mayinclude an image of a visual rotating wheel C. Herein, the visualrotating wheel C has a circular outline and a rotating key C1 locatedwithin the range of the circular outline. The rotating key C1 isgenerally a long pattern horizontally crossing the central point of theimage of the visual rotating wheel C. Therefore, the shape of thepattern of the visual rotating wheel C provides the user with a controlmanner capable of stimulating a physical button to touch and press therotating key C1 for rotation. In this embodiment, a direction of aconnecting line of two ends of the rotating key C1 is set as a directioncontrolling displacement of the movable element, and the rotating key C1may generate a touch instruction when being dragged, rotated, or slid. Aspecific using method of the visual rotating wheel C is that the usermay point the direction of the connecting line of the two ends of therotating key C1 to a direction toward which the movable element is to becontrolled to be displaced, and then performs sliding on the rotatingkey C1 to control the movable element to be displaced. Herein, a mannerof performing sliding on the rotating key C1 to generate a touchinstruction is the same as an operation manner of generating a touchinstruction on the image of the visual scroll wheel A.

According to the above embodiment, the user may freely rotate therotating key C1 to define a direction controlling displacement of themovable element, thereby enhancing the control freedom. In addition, inan embodiment, detecting a rotation action of the rotating key C1 tocontrol rotation of the movable element is also a feasibleimplementation.

In the foregoing embodiments, the operation interface W11 may furtherinclude a value display region at a position adjacent to the visualscroll wheel A, the visual joystick B, or the visual rotating wheel C,and the value display region displays a largest displacement value ofdisplacement that the movable element is controlled to correspondinglyperform. The largest displacement value of displacement may be definedby the user, it can be ensured that the movable element is within anallowed or expected displacement range in a process in which the movableelement is controlled to be displaced.

In the foregoing embodiments, the touch instructions generated by theuser on the visual scroll wheel A, the visual joystick B, and the visualrotating wheel C may all be controlling the displacement directions ofthe movable element according to generation directions of the touchinstructions. In other embodiments, distances and speeds of the touchinstructions generated on the images of the visual scroll wheel A, thevisual joystick B, and the visual rotating wheel C may be displacement,a distance, and a speed that correspondingly control the movableelement. To be specific, the speed and the distance of the touchinstruction generated on the operation interface W11 is in directproportion to a speed and distance of displacement that the movableelement is controlled to perform.

Certainly, because allowed displacement amounts of the movable elementin different directions may be different, to be specific, the largestdisplacement amounts of the movable element in different directions aredifferent, in addition to that the largest displacement values of themovable element in different directions may be separately set, atransmission ratio of the image of the visual scroll wheel A, the visualjoystick B, or the visual rotating wheel C may be defined according toneeds. For example, when four visual scroll wheels A are provided on theoperation interface W11 to respectively correspond to control of an Xdirection, a Y direction, a Z direction of the movable element, and amomentum 8, when the largest displacement amount of the movable elementin the X direction is far larger than that in the Z direction, the usercan make definition on its own, under the touch instructions ofgenerating the same distance on the images of the visual scroll wheels Acorresponding to the X direction and the Z direction, correspondinglycontrolling the movable element to be displaced for different distances.For example, it is set that a sliding touch instruction of generating 1cm on the image of the visual scroll wheel A corresponding to the Xdirection correspondingly controls the movable element to be displacedfor 10 cm, and a sliding touch instruction of generating 1 cm on theimage of the visual scroll wheel A corresponding to the Y directioncorrespondingly controls the movable element to be displaced for 1 cm.Therefore, it is ensured that control in the directions can be completedin limited space of the operation interface W11.

In addition, in the foregoing embodiments, a manner of generating thetouch instruction on the images of the visual scroll wheel A, the visualjoystick B, and the visual rotating wheel C to correspondingly controlthe movable element to be displaced may be, but is not limited to,controlling the movable element to be continuously and uninterruptedlydisplaced. In other embodiments, the movable element may be controlledto be displaced in a stepping manner, and corresponding indicationinformation may be displayed on the operation interface W11 for theoperator to learn of a current movable element displacement mode (forexample, display of STEP indicates step displacement).

Referring to FIG. 2, in an embodiment, to make the user quicklydetermine a current position and a control status of the movable elementon the touch display apparatus 14, the touch display apparatus 14 mayfurther display a third window W3. The third window W3 may, but notlimited to, overlap the second window W2 or the first window W1, and acurrent position data value of the movable element is displayed on thethird window W3.

Referring to FIG. 2 again, further, in an embodiment, the touch displayapparatus 14 further includes a fourth window W4. The fourth window W4may, but not limited to, overlap the second window W2, and the fourthwindow W4 displays a digital wafer map. The wafer map displayed on thefourth window W4 is a digital wafer map of the wafer 20 displayed on thesecond window W2, and the wafer map of the fourth window W4 has astandard mark H. The touch instruction of controlling the movableelement to be displaced on the operation interface W11 is controllingthe displacement by using the standard mark H as a standard position.Position data displayed on the third window W3 is also a relativecoordinate position value generated by using the standard mark H as astandard position.

It can be learned from the above that in the present invention, bydisplaying different visualized touch images for touch and control onthe operation interface W11, the user controls the movable element in atouch manner, and visualized images or values on the operation interfaceW11 quickly provide the user with accurate control values, therebyimproving the accuracy and efficiency of control of the movable element.

Although the present invention has been described in considerable detailwith reference to certain preferred embodiments thereof, the disclosureis not for limiting the scope of the invention. Persons having ordinaryskill in the art may make various modifications and changes withoutdeparting from the scope and spirit of the invention. Therefore, thescope of the appended claims should not be limited to the description ofthe preferred embodiments described above.

What is claimed is:
 1. A control method of a touch display apparatus,applicable to a probe station, and the method comprises: displaying afirst window and a second window on a touch display apparatus;displaying an operation interface on the first window, and displaying areal-time image on the second window, wherein the operation interfacecomprises an image of a visual scroll wheel, the image of the visualscroll wheel has a rectangular outline, a touch instruction can begenerated through sliding along a long side of the image of the visualscroll wheel, wherein the real-time image on the second window is animage that is captured by a camera stage in real time and that is of awafer on a chuck stage; and detecting the touch instruction generated onthe operation interface, a movable element performs linear displacementaccording to the touch instruction, the real-time image varies accordingto a displacement of the movable element, wherein the movable element isselected from one of the chuck stage and the camera stage and the camerastage.
 2. The control method of a touch display apparatus according toclaim 1, wherein the first window can overlap the second window in amanner of displacement.
 3. The control method of a touch displayapparatus according to claim 1, wherein the first window furtherdisplays a value display region, and the value display region displays alargest displacement value of displacement that the visual scroll wheelcontrols the movable element to correspondingly perform.
 4. The controlmethod of a touch display apparatus according to claim 1, wherein theoperation interface comprises an image of a visual joystick.
 5. Thecontrol method of a touch display apparatus according to claim 4,wherein the image of the visual joystick further comprising a touchjoystick region, an instruction generation region, and an instructionboundary, wherein the instruction boundary and the outline of the touchjoystick region form a concentric circle, the range between the outlineof the touch joystick region and the instruction boundary is theinstruction generation region, and the touch instruction can begenerated when contact with the touch joystick region is kept and thetouch joystick region is dragged to the instruction generation region.6. The control method of a touch display apparatus according to claim 4,wherein the instruction generation region further comprises a pluralityof first segment control regions, the plurality of first segment controlregions further separately comprises a plurality of second segmentcontrol regions, and the plurality of first segment control regions andthe plurality of second segment control regions can respectivelygenerate different touch instructions.
 7. The control method of a touchdisplay apparatus according to claim 6, wherein the touch instructionsrespectively generated in the plurality of first segment control regionscan control the movable element to move at different moving speeds, andthe touch instructions respectively generated in the plurality of secondsegment control regions can control the movable element to be displacedtoward different displacement directions.
 8. The control method of atouch display apparatus according to claim 1, wherein the operationinterface comprises an image of a visual rotating wheel, the visualrotating wheel has a circular outline and a rotating key located withinthe range of the circular outline, and touch and press and rotation areperformed on the rotating key to change a displacement direction of themovable element.
 9. The control method of a touch display apparatusaccording to claim 1, wherein the operation interface comprises theimage of the visual scroll wheel and an image of a visual joystick. 10.The control method of a touch display apparatus according to claim 1,wherein a manner of generating the touch instruction on the operationinterface is tap, sliding, or multi-touch.
 11. The control method of atouch display apparatus according to claim 1, wherein the touch displayapparatus further displays a third window, and the third window displaysmovement information of the movable element.
 12. The control method of atouch display apparatus according to claim 1, wherein the probe stationfurther includes a casing, the movable element is disposed inside of thecasing, the touch display apparatus is disposed outside of the casing.13. The control method of a touch display apparatus according to claim1, wherein the touch display apparatus is disposed outside of a casingof the probe station, and the chuck stage, the camera stage and thepositioner are disposed inside of the casing.